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Quick Tour to Clean Room Facility

    Clean Room Lease and Warehousing Service Available

    Clean Room Facility (450kW Power, DIW, PCW, CDA)
    for Equipment Refurbishment/Manufacturing
    near Samsung FAB Complex (5mins driving distance),
Seoul (30mins driving distance) and Incheon Int'l Airport
(90mins driving distance) in Korea

    On-Site Solar Power Generation System for Energy Saving

Used/Refurbished Equipment Inventory List
Last updated on February 2026

For Sale Now - Featured Tools
Note : All the offers below are valid till February 28, 2026.

  Note : Please click to download Configuration/Specification Files
                             to download Picture Files
                             to download Movie/Video Files
                             to download Technical Datasheet Files

<< Lithography >>

We have repurposed pre-owned ASML Lithography Systems with the state of the art of engineering (including relocation)
and supported ASML ecosystem of lifetime extension for the niche applications over 2 decades.

ASML Dry Systems : ASML PAS5500 Series (5500/100D, 5500/275D, 5500/350C, 5500/450F, 5500/750F, 5500/850C, 5500/1150C),
ASML XT:760, XT:860, ASML XT:1400E, ASML XT:1400F, ASML XT:1460
ASML Immersion Systems : ASML XT:1700Fi, ASML XT:1900Gi, ASML XT:1950Gi

* Important Notice : Buyer shall agree to comply with all applicable export control laws and regulations of the Republic of Korea and U.S.
for ASML DUV Scanners.

ASML PAS5500/300C Spare Parts - Lens Unit, Work Station, Cable Assembly and Covers

Nikon NSR2205-i11D, NSR-2205i12D, NSR-2205i14E, NSR-2205i14E2
Nikon NSR-SF120, NSR-SF130, NSR-SF140, NSR-SF150
Nikon NSR-S203B, NSR-S204B, NSR-S207D, NSR-S208D, NSR-S306B, NSR-S307E

Canon FPA-3000 Series (i4, i4+, i5, i5+, iW, EX3, EX4, EX5),
Canon FPA-5000 Series (iX, iZ, iZ+, IZA, iZE, AS2, ES, ES2, ES3, )
Canon FPA-6000 Series (AS4, ES, ES6a)

[TEL Clean Track ACT 12 Photo Resist Coat and Develop Systems ]

TEL Clean Track ACT 12 Single Block (300mm, 12") with 1Coat + 2Develop + 1Interface, Vintage 1998

   U$250,000.00 each (As-is, No Warranty, Where-is)
  TEL Clean Track ACT 12 Single Block (300mm, 12") with 1PCT(Polyimide Coat) and 1PDV(Polyimide Develop), Vintage 1998

   U$250,000.00 each (As-is, No Warranty, Where-is)

[TEL Clean Track ACT 8 Photo Resist Coat and Develop Systems, Dual Block]

  TEL Clean Track ACT 8 Dual Block (200mm, 8")
4Coat(2COT+2BCT) + 4Develop + 1Interface
Right to Left Flow, ASML Interfaced, 4 PHPs,
4SUCs/SMIF Indexers, Type3 Controller
   U$700,000.00 each (As-is cold-down, No Warranty, Where-is)

  TEL Clean Track ACT 8 Dual Block (200mm, 8")
4Coat(2COT+2BCT) + 4Develop + 1Interface
Left to Right Flow, Nikon Interfaced, 4 PHPs,
4UNC/Uni-Cassettes (Open Cassette) Indexers, Type3 Controller
   U$700,000.00 each (As-is cold-down, No Warranty, Where-is)

  TEL Clean Track ACT 8 Dual Block (200mm, 8")
3Coat(2COT+1BCT) + 4Develop + 1Interface
Right to Left Flow, ASML Interfaced, 4 PHPs,
4SUCs/SMIF Indexers, Type2 Controller
   U$650,000.00 each (As-is cold-down, No Warranty, Where-is)

  TEL Clean Track ACT 8 Dual Block (200mm, 8")
3Coat(3COT) + 4Develop + 1AdvancedInterface
Left to Right Flow, Canon ES3 DUV Scanner Interfaced,
4UNC/Uni-Cassettes (Open Cassette) Indexers, Type3 Controller
   U$650,000.00 each (As-is cold-down, No Warranty, Where-is)

[TEL Clean Track ACT 8 Photo Resist Coat and Develop Systems, Single Block]

  TEL Clean Track ACT 8 Single Block (200mm, 8")
2Coat + 2Develop + 1Interface
Left to Right Flow, Nikon NSR2205EX14C Interfaced, 4 PHPs with Full Oven Configuration
3 SUCs/SMIF Indexers, Type2 Controller
   U$450,000.00 each (As-is cold-down, No Warranty, Where-is)

  TEL Clean Track ACT 8 Single Block (200mm, 8")
2Coat + 2Develop + 1Interface
Left to Right Flow, Nikon NSR2205EX14C Interfaced, 4 PHPs with Full Oven Configuration
3 SUCs/SMIF Indexers, Type2 Controller
   U$450,000.00 each (As-is cold-down, No Warranty, Where-is)

  TEL Clean Track ACT 8 Single Block (200mm, 8")
2Coat + 2Develop + 1Interface
Left to Right Flow, Nikon S204B Interfaced, 4 PHPs with Full Oven Configuration
3 SUCs/SMIF Indexers, Type2 Controller
   U$450,000.00 each (As-is cold-down, No Warranty, Where-is)

  TEL Clean Track ACT 8 Single Block (200mm, 8")
2Coat + 2Develop + 1Interface
Left to Right Flow, Nikon S204B Interfaced, 4 CHPs with Full Oven Configuration
3 SUCs/SMIF Indexers, Type2 Controller
   U$400,000.00 each (As-is cold-down, No Warranty, Where-is)

  TEL Clean Track ACT 8 Single Block (200mm, 8")
2Coat(1COT+1TCT) + 2Develop + 1Interface
Right to Left Flow, ASML Interfaced, 3 PHPs
4UNCs/Uni-Cassettes (Open Cassette) Indexers, Type2 Controller
   U$400,000.00 each (As-is cold-down, No Warranty, Where-is)

  TEL Clean Track ACT 8 Single Block (200mm, 8")
2Coat(1COT+1TCT) + 2Develop + 1Interface
Right to Left Flow, ASML Interfaced, 3 PHPs
4UNCs/Uni-Cassettes (Open Cassette) Indexers, Type2 Controller
   U$400,000.00 each (As-is cold-down, No Warranty, Where-is)

  TEL Clean Track ACT 8 Single Block (200mm, 8")
2Coat(1COT+1TCT) + 2Develop + 1Interface
Left to Right Flow, Nikon Interfaced, 4 CHPs
4UNCs/Uni-Cassettes (Open Cassette) Indexers, Type2 Controller
   U$400,000.00 each (As-is cold-down, No Warranty, Where-is)

[TEL Clean Track Mark 8 Photo Resist Coat and Develop Systems ]

TEL Clean Track Mark 8 Single Block (200mm, 8")
2Coat +2Develop + 1Interface,
Right to Left Flow, ASML Interfaced, Vintage 1997

TEL Clean Track Mark 8 Single Block (200mm, 8")
2Coat + 2Develop + 1Interface
Right to Left Flow, ASML Interfaced, Vintage 1996

TEL Clean Track Mark 8 Single Block (200mm, 8")
2Coat + 1Develop
Left to Right Flow, Vintage 1996

[TEL Clean Track Mark 7 Photo Resist Coat and Develop Systems ]

TEL Clean Track Mark 7 Dual Blocks (200mm, 8")
2Coat + 3Develop + 1Interface
Right to Left Flow, ASML Interfaced, Vintage 1997

TEL Clean Track Mark 7 Dual Blocks (200mm, 8")
2Coat + 3Develop, Vintage 2000, 2 sets

TEL Clean Track Mark 7 Dual Blocks (200mm, 8")
5 Develop (2Develop + 3Develop), 3 sets, Vintage 2000 (2 sets) and 2001 (1 set)

TEL Clean Track Mark 7 Single Block (200mm, 8")
2Coat + 2Develop + 1Interface
Left to Right Flow, 6 sets

TEL Clean Track Mark 7 Single Block (200mm, 8")
2Develop + 2Develop, Vintage 1999

  TEL Clean Track Mark 7 Single Block (200mm, 8")
3 Develop

  TEL Clean Track Mark 7 Single Block (200mm, 8")
2 Develop + 1 RSV

  TEL Clean Track Mark 7 Single Block (200mm, 8")
3 Polyimide PIQ Coat

[DNS 80A, 80B Photo Resist Coat and Develop Systems ]

  DNS 80B (200mm, 8") Photo Resist Coat & Develop System
1Coat + 2Develop + 1Interface : Coat-Develop-Interface, 1 set

DNS 80B (150mm, 6") Photo Resist Develop System
2Develop : Blank-Develop-Develop, 1 set

DNS 80A (SKW-80A-BVPE, 200mm, 8") Photo Resist Coat & Develop System
2Develop + 1Coat + 1Interface : Blank-Develop-Develop-Coat-Interface, 2 sets

  DNS SC-W80A-AVFG (200mm, 8") SOG Coat and Vertical Furnace System (2Coat + 1Vertical Furnace)
  with New Controller and Windows GUI OS based Scheduler Software

      1) All Brand New Conventional Electrical Components (Spin Motor/Driver, Servo Motor/Driver, I/O Boards) and Main Controller
          with New Scheduler Software (Windows GUI OS).
2) Low TCO/Total Cost of Ownership on Spare Parts
          DNS SS-W80A-AVFG SOG parts are end of production.
      3) Online Communication Option (SECS/GEM, GEM300) in Scheduler Software
          DNS SC-W80A, SC-W80B requires additional DNS OEM Hareware and Software License for FAB Online Communication.
      4) Advanced Features
          A. Real Time Wafer Log Tracking System per Each Wafer, Auto Back-up System
          B. Wafer Level Recipe Processing, Multi Recipe/Job Processing per Cassette (MAX 25 Recipes per 1 Cassette)
          C. Automatic Wafer Collection Feature
          D. Wireless/WiFi Remote Monitoring Feature
          E. Auto Teaching Feature
          F. Easy Recipe Editing Feature

<< Lithography - Flow Monitoring Solutions for Resist Cost Down and Process Failure Avoidance >>

LithoFlow Flow Sensor (either Fin-Flow or Micro MEMS type) and Monitoring System for
(Resist Volume Cost Down, Real-Time Process Monitoring with Alarm/Interlock to avoid Process Accident such as Wafer Scraps)

      Photo Resist, SOG/SOD, Solvent (EBR, Back Rinse, Solvent Bath, Cup Rinse, Nozzle Rinse), Develop Solutions, DIW Top Rinse, etc.
  - Available for All Photo Tracks including
   TEL Lithius, Lithius Pro
   Sokudo
   TEL Clean Track Mark 7, Mark 8, ACT 8 or ACT 12
   DNS 60A, 60B, 80A, 80B, SK200W, SK2000.
   SVG 86, 88, 90, 90-S, 90-SE
   Tazmo SEMIX SOG Coater
   - Multi Recipe Support (MAX 20 Recipes per Dispense Nozzle)
  - Interchangeable with TEL OEM Fin Flow Sensor for TEL Clean Track ACT 8 and ACT 12

System Details :
A. Single Tool/Machine Application :
     - USB Connection to 1 Laptop for 1 Tool/Machine
     - MAX 8 Spin Units, 32 Sensors with 4 Interface Controllers via USB Hub (4 Ports)
- 1 Band Output : 1 Upper Limit (Alarm or Interlock) and 1 Lower Limit (Alarm/Warning or Interlock/Stop)
      - FDC Option Support Available
B. Multi Tools/Machines Groupware Application :
     - Ethernet Connection to Laptops and Main Server via Access Point and Ethernet Hub
- MAX 250 Tools interconnected
- MAX 300 Sensors per Tool (MAX 120 Spin Units) with 15 Interface Controller (1 Main Controller + 1 Add-on Controller)
which support Both Digital Pulse Sensor Input and Analog Sensor Input
- MAX 75,000 Sensors (MAX 250 Tools, 30,000 Spin Units) with 3,750 Interface Controllers
    - Multi Bands Outputs : Max 3 Upper & Lower Limit "Alarm/Warning" and 1 Upper & 1 Lower Limit "Interlock/Stop"
- FDC Option Support Available

Qualification and Installation Acheivement Records
Wafer FABs in North America, P.R. China, Japan and Singapore

Other Applications
   Semiconductor Manufacturing Application
- Spin Scrubbing Cleaning System
   - Wet Station
   - Spin Etch System
   - CVD Liquid Gas Flow Monitoring
   - CMP Slurry Supply System and Chemical Supply System
Flat Panel Display Manufacturing Application
Bio Industry Application
Medial Industry Application
Construction Industry Application

<< Clean >>

  DNS SS-W80A-AR (200mm, 8") Spin Scrubber, 2 Front + 2 Back + 2 Reverse, D-Sonic

KDNS SS-W80A-AR (200mm, 8") Spin Scrubber, 2 Front + 2 Back + 2 Reverse, D-Sonic

KDNS SS-W80A-AR (200mm, 8") Spin Scrubber, 2 Front + 2 Back + 2 Reverse, High Pressure Jet

  DNS SS-W80A-AR (200mm, 8") Spin Scrubber, 1 Front + 3 Back + 1 Reverse, High Pressure Jett

KDNS SS-W80A-AR (200mm, 8") Spin Scrubber, 4 Front, Nano Spray

  DNS SS-W80A-AR (200mm, 8") Spin Scrubber, 4 Front, Nano Spray - 2 sets

  DNS SS-W80A-AR (200mm, 8") Spin Scrubber, 4 Front, High Pressure Jet

  DNS SS-W80A-AR (200mm, 8") Spin Scrubber, 3 Front + 1 Blank, D-Sonic

  DNS SS-W80A-AR (200mm, 8") Spin Scrubber, 3 Front + 1 Blank, High Pressure Jet

  DNS SS-W80A-AR (200mm, 8") Through-put Upgraded Spin Scrubber
  with New Controller and Windows GUI OS based Scheduler Software
      3 Front Sides (Nano-Spray + PVA Brush), 3 Back Sides (Nano-Spray), 2 Reverse Units
      2 Front Sides (Nano-Spray + PVA Brush), 2 Back Sides (Nano-Spray), 2 Reverse Units

      1) All Brand New Conventional Electrical Components (Spin Motor/Driver, Servo Motor/Driver, I/O Boards) and Main Controller & Touch Panel
          with New Scheduler Software (Windows GUI OS).
2) Low TCO/Total Cost of Ownership on Spare Parts
          DNS SS-W80A-AVFG SOG parts are end of production.
      3) High Through-put/WPH : 270 Wafers/hour (WPH) for 4 Front Side Configuration (35sec Processing Time per each chamber)
          58.8% increased from WPH of DNS SS-W80A-AR
          22.7% increased from WPH of DNS SS-W80B-AR
      4) High Through-put/WPH : 135 Wafers/hour (WPH) for 2 Front + 2 Back Side Configuration (35sec Processing Time per each chamber)
          35.0% increased from WPH of DNS SS-W80A-AR
          12.5% increased from WPH of DNS SS-W80B-AR
      5) Small Foot Print (No External AC Power Transformer Required.)
      6) Speed Control Feature on Scanning Arm at Scrubbing Units for High Throughput
      7) Online Communication Option (SECS/GEM, GEM300) in Scheduler Software
          while DNS SC-W80A, SC-W80B requires additional DNS OEM Hareware and Software License for FAB Online Communication.
      8) Advanced Features
          A. Real Time Wafer Log Tracking System per Each Wafer, Auto Back-up System
          B. Wafer Level Recipe Processing, Multi Recipe/Job Processing per Cassette (MAX 25 Recipes per 1 Cassette)
          C. Automatic Wafer Collection Feature
   D. Flexible Loading/Unloading Option (4 ports)
             User can designate any Cassette Slot/Port as Loading Slot/Port or Unloading Slot/Port
              Note : 25 slots per Cassette (or Port)
          E. Wireless/WiFi Remote Monitoring Feature
          F. Auto Teaching Feature
          G. Easy Recipe Editing Feature
          H. Locking Bar on Cassette Station to avoid Operator's Mistake to pick up Unfinished Lot/Cassette (Non-SMIF only)

<< Etch >>

AMAT DPS II Metal Etcher (300mm, 12")
3 DPS II Chambers and 2 Axiom Chambers, Vintage 2008, 1 set

Novellus-Gasonics A3010 Dry Asher (200mm, 8")

<< CVD >>

AMAT P5000 PECVD, TEOS with 3 CVD Chambers, 200mm(8")

<< RTP >>

Mattson AST 3000 RTP
200mm(8"), Vintage 2000, Operational Condition, 1 set

<< Metrology >>

Nicolet ECO-1000s FT-IR, Vintage 1996

SDI SPV-1050 Contamination Monitoring System, Vintage 1996

  << Others >>

   Asyst Spartan EFEM Wafer Metrology Sorter
  300mm(12"), Vintage 1997

Asyst PST100 SMIF Integrated Wafer Metrology Sorter
200mm(8"), 2 SMIF Ports + 1 Open Cassette Plate, Vintage 1996, 2sets

<< Back-End >>

Heavy Smoker for DFD6361 Dicing Saw System
Vintage 2006, Operational Condition

NGK Maggcon II, CO2 Bubbler, RCII-2000ACD-S for DFD6361 Dicing Saw System
Vintage 2006, Operational Condition

Disco DSC141 Spin/Rinse/Drying Cleaner (200mm, 8")
Vintage 2006, Operational Condition

  Nitto-Denko HR8500 II Detaper (Tape Remover) with UV Unit
      200mm(8"), Vintage 1994

  Nitto-Denko HR8500 II Detaper (Tape Remover) without UV Unit
      200mm(8"), Vintage 1994, NIL Touch Panel Controller Missing

  Nitto-Denko HR8500 II Detaper (Tape Remover) with UV Unit
      200mm(8"), Vintage 1994, Some Parts Missing

  Nitto-Denko DR8500 II Taper (Taping System, Laminator, Wafer Mounting System)
      200mm(8"), Vintage 1994

  Nitto-Denko DR8500 II Taper (Taping System, Laminator, Wafer Mounting System)
      200mm(8"), Vintage 1995, Some Parts Missing

  Takatori ATRM-2100 Detaper (Tape Remover), 200mm(8"), Vintage 1997

  Takatori ATM-8100 Detaper (Tape Remover), 200mm(8"), Vintage 1996

Lintec RAD2000/F8, UV Irradiator for Detaping System, Vintage 1996

<< ATE >>

TEL P-12XL 300mm Automatic Wafer Probe Station with Manipulator
Inspection available with Power-up and Initialization

Manipulator (MHF300L) of Accretech-TSK UF200SA for sale, 2 sets

OCR Option of Accretech-TSK UF200SA for sale, 2 sets

<< Cryo Pumps and Compressors >>
HELIX CTI-Cryogenetics Cryo Compressor 8510, 9 sets
HELIX CTI-Cryogenetics Cryo Compressor 8500, 1 set

<< Turbo Modular Pumps and Controllers >>
Edwards - Seiko Seiki MG-STPH600G-T62B, 1 set
Edwards - Seiko Seiki MG-STPH600C-T62C, 1 set
Edwards - Seiko Seiki STP-H600C1, 1 set
Edwards - Seiko Seiki STP301, 3 sets

<< Dry Pumps and Roughing Pumps >>
Edwards iH600, 18 sets
Edwards iH80, 6 sets
Edwards iGX6/100M 200V, 4 sets
Edwards iGX6/100N 200V, 1 set
Edwards iQDP80 + QMB500, 15 sets
Edwards iQDP80 + QMB250, 4 sets
Edwards iQDP80, 11 sets
Edwards QDP80, 2 sets
Edwards QDP80 + QMB500, 1 set
Edwards iQDP40, 6 sets
Edwards QDP40, 4 sets
Edwards Pump Display Module Terminal, 8ea
Edwards Pump Interface Module P/N A52844460, 10ea
Edwards Pump Interface Module P/N D37215000, 11ea
Edwards Pump Interface Module P/N A52844413, 2ea
Edwards Pump Overcurrent Protection Unit P/N A38054210, 1ea
Edwards Pump Overcurrent Protection Unit P/N A38054220, 1ea
Edwards Pump Overcurrent Protection Unit P/N N38054005, 1ea
Edwards Pump Overcurrent Protection Unit P/N N38054005 with Pump Rack, 1ea
Edward Pump Rack, 10 sets
Ebara 80x25, 3 sets
Ebara 40x20, 2 sets
Ebara A150W-T, 3 sets
Ebara A70W, 4 sets
Ebara A30W, 3 sets
Alcatel ADS501, 15 sets
Leybold WSU501, 2 sets
Kashiyama SD90V, 1 set

<< Heat Exchanger >>
AMAT 0 Heat Exchanger (0221-10785 REV B), 1 set

<< Chiller >>
Lam Research TCU2080 Dual Channel Chiller, 2 sets
M&W RPC2 Dual Channel Chiller, 6 sets
Neslab HX150+W/C Chiller, 5 sets
SMC INR-341-54C Chiller, 2 sets
Cosam BCU-B952LT Chiller, 2 sets
Cosam BCU-E152RSD-AMLR Chiller, 1 set
Cosam BCU-E152RSE-AMAT Chiller, 2 sets
FST FST/C-HS308H Chiller, 1 set
Lasemtech BCU-A512-K Chiller, 1 set
Lasemtech BCU-E110RS-COM Chiller, 3 sets
Speed Engineering SPEED-800A Chiller, 1 set

Refurbishment, Modificiation, Upgrade and Installation/Start-up Service

Justin BD&L, Inc. is a leading solution provider for Refurbishment, Upgrade, Modification and Technical Service for the following tools

  TEL Lithius, Lithius i, Lithius i+, Lithius Pro - 300mm(12") Photo Resist Coat/Develop System
      Upgraded Oven Exhaust to extend PM frequency and Minimize Coating Failure Issues
      Upgraded Catch Cup for Coat Unit to extend PM frequency and Minimize Coating Failure Issue
      Upgraded Wafer Guide Assembly to extend its Life Time.

  Sokudo RF3, RF3S, RF Duo - 300mm(12") Photo Resist Coat/Develop System
      Upgraded Oven Exhaust to extend PM frequency and Minimize Coating Failure Issues
      Upgraded Wafer Guide Assembly to extend its Life Time.

  TEL Clean Track ACT 12 Photo Resist Coat and Develop System
      Spare Parts, Full Refurbishment, Modification, Upgrade, Start-up/Installation and Warranty Service
      High Through-put Upgraded PRA, CRA, IRA
      Upgraded Oven Exhaust to extend PM frequency and Minimize Coating Failure Issues
      Upgraded Catch Cup for Coat Unit to extend PM frequency and Minimize Coating Failure Issue
      Upgraded Wafer Guide Assembly to extend its Life Time.

  TEL Clean Track ACT 8 Photo Resist Coat and Develop System
      Spare Parts, Full Refurbishment, Modification, Upgrade, Start-up/Installation and Warranty Service
      New SMIF CSB/Cassette Station Block (3 Indexers Type or 4 Indexers Type)
      High Through-put Upgraded PRA, CRA, IRA

  TEL Clean Track Mark II, V, Vz, 7, 8 Photo Resist Coat and Develop System
      Spare Parts, Full Refurbishment, Modification, Upgrade, Start-up/Installation and Warranty Service
      New SMIF CSB/Cassette Station Block (3 SUCs or 4 SUCs SMIF Indexer)

DNS SS-W80A-AR, SS-W80B-AR Wafer Spin Scrubbing System
Spare Parts, Full Refurbishment, Modification, Upgrade, Start-up/Installation and Warranty Service

DNS 636, 629, 60A, 60B, 80A, 80B Photo Resist Coat and Develop System
Spare Parts, Full Refurbishment, Modification, Upgrade, Start-up/Installation and Warranty Service

SVG Photo Resist Coat and Develop System
Spare Parts, Full Refurbishment, Modification, Upgrade, Start-up/Installation and Warranty Service

Nikon g-line, i-line, DUV Step/Scanner
Spare Parts, Full Refurbishment, Modification, Upgrade, Start-up/Installation and Warranty Service

Ebara EPO2228, FREX200 CMP System
Spare Parts, Full Refurbishment, Modification, Start-up/Installation and Warranty Service

KLA-Tencor-Thermawave TP Series and OP Series
Spare Parts, Full Refurbishment, Modification, Start-up/Installation and Warranty Service

Hitachi S6XXX, S8XXX, S9XXX CDSEM, FESEM and FEI-Philips XL series FESEM
Spare Parts, Full Refurbishment, Modification, Start-up/Installation and Warranty Service

AMAT P5000, Centura, Centura II Etch, CVD and Endura 5500 PVD and Mirra CMP System Series
Spare Parts, Full Refurbishment, Modification, Upgrade, Start-up/Installation and Warranty Service

Lam Research Rainbow, TCP, A6 Etch System Series
Spare Parts, Full Refurbishment, Modification, Upgrade, Start-up/Installation and Warranty Service

Varian 120XP, 160XP, E1000, 300XP, 350D, E220, E500, VIISta, VIISion Ion Implant System
Spare Parts, Full Refurbishment, Modification, Start-up/Installation and Warranty Service

Axcelis-Eaton NV6200, NV6200A, NV6200AV, NV10-160, NV10-180, NV-GSD Ion Implant System
Spare Parts, Full Refurbishment, Modification, Start-up/Installation and Warranty Service

Axcelis-Fusion 150PC, 200PCU, M200PCU Polo, Gemini UV Stabiliztion/Bake System Series
Full Refurbishment, Start-up/Installation and Warranty Service

Mattson SHS2800, SHS2900 and AG Associate 4104, 8108 Single Chamber RTP Series
Spare Parts, Full Refurbishment, Modification, Start-up/Installation and Warranty Service

All Dry Ashing System : Novellus-Gasonics, Ramco, PSC Series
Spare Parts, Full Refurbishment, Modification, Start-up/Installation and Warranty Service

New Automatic, Semi-Auto and Manual Wet Bench/Station

DNS, Sugai, Kaijo, SES, SEZ and Akrion Wet Station Series
Spare Parts, Full Refurbishment, Modification, Start-up/Installation and Warranty Service

New WMS/Wafer Metrology Sorter (up to 300mm wafer size)

Asyst, Rorze and Other Makers WMS/Wafer Metrology Sorter
Spare Parts, Full Refurbishment, Modification, Start-up/Installation and Warranty Service

Accretech-TSK (A-PM-90A, UF200, UF200S, UF200SA, UF3000) Prober
      Spare Parts, Full Refurbishment, Modification, Start-up/Installation and Warranty Service
      Upgraded to Cold Chuck (-40'C) with Chiller
      Modification for Square Type of Probe Card Holder

  TEL (P-8, P-8XL, P-12XL, P-12XLn)
      Spare Parts, Full Refurbishment, Modification, Start-up/Installation and Warranty Service
      Upgraded to Cold Chuck (-40'C) with Chiller
      Modification for Square Type of Probe Card Holder

Disco Back Grinder (DFG840, DFG8540)
Spare Parts, Full Refurbishment, Modification, Start-up/Installation and Warranty Service

Nitto Automatic Taper (Wafer Mounter, Laminator) and Detaper (Tape Remover)
Spare Parts, Full Refurbishment, Modification, Start-up/Installation and Warranty Service

Disco, K&S and TSK Dicing Saw
Spare Parts, Full Refurbishment, Modification, Start-up/Installation and Warranty Service